1. Name and Address of Reporting Person Skates, Ronald L. c/o Cabot Microelectronics Corporation 870 Commons Drive Aurora, IL 60504 USA 2. Issuer Name and Ticker or Trading Symbol Cabot Microelectronics Corporation (CCMP) 3. IRS or Social Security Number of Reporting Person (Voluntary) 4. Statement for Month/Day/Year 03/13/2003 5. If Amendment, Date of Original (Month/Day/Year) 6. Relationship of Reporting Person(s) to Issuer (Check all applicable) (X) Director ( ) 10% Owner ( ) Officer (give title below) ( ) Other (specify below) 7. Individual or Joint/Group Filing (Check Applicable Line) (X) Form filed by One Reporting Person ( ) Form filed by More than One Reporting Person TABLE I -- Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned +------------------------------+----------+----------+---------+--------------------------+--------------+-----------+------------+ |1. Title of Security |2. Trans- |2A.Execu- |3. Trans-|4. Securities Acquired (A)|5. Amount of |6. Owner- |7. Nature | | | action | action | action| or Disposed of (D) |Securities | ship | of In- | | | Date | Date | Code | |Beneficially | Form: | direct | | | | | | |Owned | Direct | Bene- | | | (Month/ | (Month/ | | |Following | (D) or | ficial | | | Day/ | Day/ +-----+---+-----------+---+----------+Reported | Indirect| Owner- | | | Year) | Year) |Code |V |Amount |A/D|Price |Transaction(s)| (I) | ship | +------------------------------+----------+----------+-----+---+-----------+---+----------+--------------+-----------+------------+ Common Stock 2560D TABLE II -- Derivative Securities Acquired, Disposed of, or Beneficially Owned +----------+--------+-------+-------+---------+-----------+---------------------+----------------+----------+-------+-------+------+ |1. |2. |3. |3A. |4. |5. |6. |7. |8. |9. |10. |11. | | | | | | | | | | |Number |Owner- | | | | | | | | | | | |of |ship | | | | | | | | | | | |Deriv- |Form of| | | | | | | | | |Title and Amount| |ative |Deriv- | | | | | | | | | |of Underlying | |Secur- |ative |Nature| | |Conver- |Trans- |Execu- | |Number of | |Securities | |ities |Secur- |of | | |sion or |action |tion | |Derivative |Date Exercisable +-------+--------+ |Benefi-|ity: |In- | | |Exercise|Date |Date | |Securities |and Expiration Date | |Amount | |cially |Direct |direct| | |Price of| | |Transac- |Acquired(A)|(Month/Day/Year) | |or | |Owned |(D) or |Bene- | |Title of |Deriv- |(Month/|(Month/|tion Code|Disposed(D)+----------+----------+ |Number |Price of | |In- |ficial| |Derivative|ative | Day/ | Day/ +------+--+-----+-----+Date Exer-|Expira- | |of |Derivative| |direct |Owner-| |Security |Security|Year) |Year) |Code |V |(A) |(D) |cisable |tion Date |Title |Shares |Security | |(I) |ship | +----------+--------+-------+-------+------+--+-----+-----+----------+----------+-------+--------+----------+-------+-------+------+ Stock $20 04/04/2005 Common 20000 D Options Stock (Right to buy) Stock $38.34 03/11/2 03/11/2 A 7500 03/11/2004 03/11/2013 Common 7500 $0.0000 7500 D Options 003 003 Stock (Right to buy) Stock $46.875 03/13/2008 Common 7500 D Options Stock (Right to buy) Stock $65.73 03/12/2012 Common 7500 D Options Stock (Right to buy) Explanation of Responses: SIGNATURE OF REPORTING PERSON /s/ Ronald L. Skates DATE 03/11/2003 Cabot Corporation (NYSE: CBT) spun off its 80.5 percent equity interest in CCMP by distributing a special dividend to CBT common stockholders of record as of the close of business on 9/13/2000. The tax-free distribution took place on 9/29/2000. Mr. Skates received 560 shares of CCMP as a result of this special dividend. Vesting Schedule: 25% March 11, 2004 25% March 11, 2005 25% March 11, 2006 25% March 11, 2007